Unconventional Methods for Fabricating and Patterning Nanostructures.
نویسندگان
چکیده
4.1. Nanomachining with Scanning Probes 1831 4.2. Soft Lithography 1832 4.3. Embossing with Rigid Masters 1835 4.4. Near-Field Phase-Shifting Photolithography 1835 4.5. Topographically Directed Photolithography 1837 4.6. Topographically Directed Etching 1837 4.7. Lithography with Neutral Metastable Atoms 1838 4.8. Approaches to Size Reduction 1839 5. Techniques for Making Regular or Simple Patterns 1839
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ورودعنوان ژورنال:
- Chemical reviews
دوره 99 7 شماره
صفحات -
تاریخ انتشار 1999